{"id":1243,"date":"2026-08-05T14:06:24","date_gmt":"2026-08-05T06:06:24","guid":{"rendered":"https:\/\/guagefangzhen.cn\/?p=1243"},"modified":"2026-08-05T14:06:24","modified_gmt":"2026-08-05T06:06:24","slug":"%e9%93%81%e7%94%b5%e6%9d%90%e6%96%99%ef%bc%9amems%e9%a2%86%e5%9f%9f%e7%9a%84%e9%9a%90%e5%bd%a2%e5%8a%9f%e8%87%a3","status":"publish","type":"post","link":"https:\/\/guagefangzhen.cn\/?p=1243","title":{"rendered":"\u94c1\u7535\u6750\u6599\uff1aMEMS\u9886\u57df\u7684\u9690\u5f62\u529f\u81e3"},"content":{"rendered":"\n
\n

\u4ece”\u7535\u8bb0\u5fc6”\u7684\u7269\u7406\u672c\u8d28\u5230\u5fae\u7eb3\u4e16\u754c\u7684\u5de5\u7a0b\u5e94\u7528\u4e0e\u4eff\u771f<\/p>\n<\/blockquote>\n\n\n\n

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\u5b83\u4e0d\u662f\u94c1\uff0c\u4e5f\u4e0d\u5e26\u78c1\u6027\uff0c\u4f46\u5b83\u6709\u4e00\u79cd\u8fd1\u4e4e”\u8d85\u80fd\u529b”\u7684\u672c\u9886\uff1a\u7535\u8bb0\u5fc6<\/strong>\u3002\u7ed9\u5b83\u4e00\u4e2a\u7535\u573a\uff0c\u5b83\u5c31\u80fd”\u8bb0\u4f4f”\u65b9\u5411\uff1b\u64a4\u6389\u7535\u573a\uff0c\u5b83\u4f9d\u7136\u4fdd\u6301\u2014\u2014\u5c31\u50cf\u4e00\u79cd\u5fae\u89c2\u4e16\u754c\u7684”\u4fbf\u7b7e\u7eb8”\u3002\u66f4\u5999\u7684\u662f\uff0c\u8fd9\u79cd\u8bb0\u5fc6\u8fd8\u80fd\u88ab\u6539\u5199\uff0c\u800c\u6539\u5199\u7684”\u7b14”\u4e0d\u8fc7\u662f\u4e00\u5b9a\u5f3a\u5ea6\u7684\u5916\u52a0\u7535\u573a\u3002<\/p>\n\n\n\n

\u4eca\u5929\uff0c\u6211\u4eec\u5c31\u6765\u7cfb\u7edf\u5730\u8ba4\u8bc6\u8fd9\u4f4dMEMS\u9886\u57df\u7684\u9690\u5f62\u529f\u81e3\u2014\u2014\u4ece\u5b83”\u4e3a\u4ec0\u4e48\u4f1a\u8bb0\u5fc6”\u7684\u7269\u7406\u672c\u8d28\uff0c\u5230\u5b83\u5728\u5fae\u7eb3\u4e16\u754c\u7684\u5404\u79cd\u5e94\u7528\uff0c\u518d\u5230\u5de5\u7a0b\u5e08\u4eec\u5982\u4f55\u7528\u4eff\u771f\u624b\u6bb5\u5728\u8ba1\u7b97\u673a\u91cc”\u590d\u523b”\u5b83\u7684\u884c\u4e3a\u3002<\/p>\n\n\n\n

\n\n\n\n

\u4e00\u3001\u94c1\u7535\u6750\u6599\uff1a\u4e00\u5757\u4f1a”\u8bb0\u5fc6”\u7684\u6676\u4f53<\/h2>\n\n\n\n

1.1 \u81ea\u53d1\u6781\u5316\u2014\u2014\u4e0d\u9700\u8981\u5916\u573a\u7684”\u5185\u7f6e\u504f\u597d”<\/h3>\n\n\n\n

\u5927\u591a\u6570\u7edd\u7f18\u4f53\u5728\u5916\u52a0\u7535\u573a\u65f6\u624d\u4f1a\u4ea7\u751f\u6781\u5316\u2014\u2014\u6b63\u8d1f\u7535\u8377\u4e2d\u5fc3\u5206\u79bb\uff0c\u6750\u6599\u5bf9\u5916\u663e\u793a\u7535\u6027\u3002\u4f46\u94c1\u7535\u6750\u6599\u4e0d\u540c\uff1a\u5373\u4f7f\u6ca1\u6709\u4efb\u4f55\u5916\u52a0\u7535\u573a\uff0c\u5b83\u7684\u6b63\u8d1f\u7535\u8377\u4e2d\u5fc3\u5c31\u5df2\u7ecf\u5206\u79bb\u4e86<\/strong>\uff0c\u6bcf\u4e2a\u6676\u80de\u5929\u751f\u81ea\u5e26\u4e00\u4e2a\u7535\u5076\u6781\u77e9\u3002<\/p>\n\n\n\n

\u8fd9\u5c31\u50cf\u4e00\u7fa4\u4eba\u7ad9\u5728\u64cd\u573a\u4e0a\uff0c\u666e\u901a\u6750\u6599\u91cc\u5927\u5bb6\u9762\u671d\u5404\u4e2a\u65b9\u5411\u3001\u4e71\u4e03\u516b\u7cdf\uff1b\u800c\u94c1\u7535\u6750\u6599\u91cc\uff0c\u6bcf\u4e2a”\u5c0f\u5206\u961f”\uff08\u7535\u7574\uff09\u7684\u4eba\u81ea\u53d1\u5730\u671d\u540c\u4e00\u4e2a\u65b9\u5411\u7ad9\u597d\uff0c\u6574\u6574\u9f50\u9f50\u3002\u8fd9\u79cd\u65e0\u9700\u5916\u573a\u5c31\u5b58\u5728\u7684\u6781\u5316<\/strong>\uff0c\u53eb\u505a\u81ea\u53d1\u6781\u5316\uff08Spontaneous Polarization\uff09<\/strong>\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u25b2 \u94c1\u7535\u6750\u6599\u81ea\u53d1\u6781\u5316\u65b9\u5411\u793a\u610f\u56fe\uff1aBiFeO\u2083 \u8584\u819c\u5728\u4e0d\u540c\u754c\u9762\u7ec8\u6b62\u5c42\u4e0b\u53ef\u5f62\u6210\u4e24\u79cd\u76f8\u53cd\u7684\u6781\u5316\u65b9\u5411\uff08A\uff1aBiO \u754c\u9762\uff0c\u6781\u5316\u5411\u4e0a\uff1bB\uff1aSrO \u754c\u9762\uff0c\u6781\u5316\u5411\u4e0b\uff09\u3002\u8fd9\u8bf4\u660e\u81ea\u53d1\u6781\u5316\u5e76\u975e\u968f\u673a\u51fa\u73b0\uff0c\u800c\u662f\u6709\u786e\u5b9a\u7684\u77e2\u91cf\u65b9\u5411\uff0c\u53ef\u4ee5\u88ab\u6750\u6599\u754c\u9762\u6761\u4ef6\u8c03\u63a7\u3002\uff08\u56fe\u6e90\uff1a\u6781\u70b9\u4eea\u5668 \/ BiFeO\u2083 \u6781\u5316\u914d\u4f4d\u6587\u732e\uff09<\/em><\/p>\n\n\n\n

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1.2 \u7535\u6ede\u56de\u7ebf\u2014\u2014\u94c1\u7535\u6027\u7684”\u6307\u7eb9”<\/h3>\n\n\n\n

\u5982\u679c\u6211\u4eec\u753b\u4e00\u5f20\u56fe\uff1a\u6a2a\u8f74\u662f\u5916\u52a0\u7535\u573aE\uff0c\u7eb5\u8f74\u662f\u6781\u5316\u5f3a\u5ea6P\uff0c\u7136\u540e\u6162\u6162\u589e\u5927\u7535\u573a\u518d\u53cd\u5411\u2014\u2014\u4f60\u4f1a\u5f97\u5230\u4e00\u6761\u5c01\u95ed\u7684\u66f2\u7ebf\uff0c\u8fd9\u5c31\u662f\u5927\u540d\u9f0e\u9f0e\u7684\u7535\u6ede\u56de\u7ebf\uff08P-E Hysteresis Loop\uff09<\/strong>\u3002<\/p>\n\n\n\n

\u7535\u6ede\u56de\u7ebf\u662f\u94c1\u7535\u6750\u6599\u7684”\u6307\u7eb9”\u3002\u5b83\u6709\u51e0\u4e2a\u5173\u952e\u53c2\u6570\uff1a<\/p>\n\n\n\n

    \n
  • \u9971\u548c\u6781\u5316Ps<\/strong>\uff1a\u7535\u573a\u8db3\u591f\u5927\u65f6\uff0c\u6240\u6709\u7535\u7574\u90fd\u6cbf\u7535\u573a\u65b9\u5411\u6392\u5217\uff0c\u6781\u5316\u8fbe\u5230\u6700\u5927\u503c<\/li>\n\n\n\n
  • \u5269\u4f59\u6781\u5316Pr<\/strong>\uff1a\u7535\u573a\u64a4\u4e3a\u96f6\u65f6\uff0c\u6750\u6599”\u8bb0\u4f4f”\u7684\u6781\u5316\u503c\u2014\u2014\u8fd9\u662f\u5b58\u50a8\u5e94\u7528\u7684\u6838\u5fc3<\/li>\n\n\n\n
  • \u77eb\u987d\u573aEc<\/strong>\uff1a\u8981\u628a\u6781\u5316”\u6e05\u96f6”\u6240\u9700\u65bd\u52a0\u7684\u53cd\u5411\u7535\u573a\u2014\u2014\u76f8\u5f53\u4e8e”\u64e6\u9664\u8bb0\u5fc6”\u7684\u4ee3\u4ef7<\/li>\n<\/ul>\n\n\n\n
    \"\"<\/figure>\n\n\n\n

    \u25b2 \u771f\u5b9e\u6d4b\u91cf\u7684 P-E \u7535\u6ede\u56de\u7ebf\uff081kHz, 40V \u6d4b\u8bd5\u6761\u4ef6\uff09\u3002\u6a2a\u8f74\u4e3a\u5916\u52a0\u7535\u573a\uff08kV\/cm\uff09\uff0c\u7eb5\u8f74\u4e3a\u6781\u5316\u5f3a\u5ea6\uff08\u03bcC\/cm\u00b2\uff09\u3002\u4e0d\u540c\u66f2\u7ebf\u5bf9\u5e94\u4e0d\u540c\u4e32\u8054\u7535\u963b Rsq \u4e0b\u7684\u6d4b\u8bd5\u7ed3\u679c\u3002\u53ef\u4ee5\u6e05\u695a\u770b\u5230\u5269\u4f59\u6781\u5316 Pr \u4e0e\u77eb\u987d\u573a Ec \u4e24\u4e2a\u5173\u952e\u53c2\u6570\u3002\uff08\u56fe\u6e90\uff1a\u767e\u5ea6\u767e\u79d1 \/ \u5b9e\u9a8c\u6d4b\u8bd5\u6570\u636e\uff09<\/em><\/p>\n\n\n\n

    \u5982\u679c\u4f60\u5bf9\u94c1\u78c1\u6750\u6599\u6709\u6240\u4e86\u89e3\uff0c\u7535\u6ede\u56de\u7ebf\u548c\u78c1\u6ede\u56de\u7ebf\u7b80\u76f4\u662f”\u4eb2\u5144\u5f1f”\u2014\u2014\u4e00\u4e2a\u63cf\u7ed8\u7535\u7684\u54cd\u5e94\uff0c\u4e00\u4e2a\u63cf\u7ed8\u78c1\u7684\u54cd\u5e94\u3002\u4e8b\u5b9e\u4e0a\uff0c”\u94c1\u7535”\u8fd9\u4e2a\u540d\u5b57\u5c31\u6765\u6e90\u4e8e\u6b64\uff1a\u94c1\u7535\u6027\uff08Ferroelectricity\uff09\u548c\u94c1\u78c1\u6027\uff08Ferromagnetism\uff09\u5728\u6570\u5b66\u63cf\u8ff0\u4e0a\u9ad8\u5ea6\u5e73\u884c<\/strong>\uff0c\u90fd\u6709\u81ea\u53d1\u5e8f\u53c2\u91cf\u3001\u90fd\u6709\u6ede\u540e\u56de\u7ebf\u3001\u90fd\u6709\u76f8\u53d8\u6e29\u5ea6\u2014\u2014\u53ea\u4e0d\u8fc7\u94c1\u7535\u7684\u5e8f\u53c2\u91cf\u662f\u6781\u5316P\uff0c\u94c1\u78c1\u7684\u662f\u78c1\u5316M\u3002<\/p>\n\n\n\n

    \n

    \u26a1 \u4e00\u4e2a\u5e38\u89c1\u7684\u8bef\u89e3\uff1a\u94c1\u7535\u6750\u6599\u5e76\u4e0d\u542b\u94c1\uff01”Ferro-“\u8fd9\u4e2a\u524d\u7f00\u53ea\u662f\u501f\u7528\u94c1\u78c1\u6027\u7684\u7c7b\u6bd4\uff0c\u8868\u793a”\u7c7b\u4f3c\u94c1\u78c1\u7684\u884c\u4e3a”\u3002\u5927\u591a\u6570\u94c1\u7535\u6750\u6599\u662f\u6c27\u5316\u7269\u9676\u74f7\u6216\u6709\u673a\u9ad8\u5206\u5b50\uff0c\u8ddf\u94c1\u5143\u7d20\u6ca1\u6709\u534a\u6bdb\u94b1\u5173\u7cfb\u3002<\/p>\n<\/blockquote>\n\n\n\n

    1.3 \u5c45\u91cc\u6e29\u5ea6\u2014\u2014”\u8bb0\u5fc6”\u6d88\u5931\u7684\u4e34\u754c\u70b9<\/h3>\n\n\n\n

    \u94c1\u7535\u6027\u4e0d\u662f\u6c38\u6052\u7684\u3002\u6bcf\u79cd\u94c1\u7535\u6750\u6599\u90fd\u6709\u4e00\u4e2a\u5c45\u91cc\u6e29\u5ea6\uff08Curie Temperature, Tc\uff09<\/strong>\uff0c\u5f53\u6e29\u5ea6\u5347\u9ad8\u8d85\u8fc7\u8fd9\u4e2a\u503c\uff0c\u6750\u6599\u4ece\u94c1\u7535\u76f8\u8f6c\u53d8\u4e3a\u987a\u7535\u76f8\uff08Paraelectric Phase\uff09<\/strong>\u2014\u2014\u81ea\u53d1\u6781\u5316\u6d88\u5931\u4e86\uff0c”\u8bb0\u5fc6”\u529f\u80fd\u4e5f\u6ca1\u4e86\u3002<\/p>\n\n\n\n

    \u8fd9\u5c31\u50cf\u6c34\u5728100\u00b0C\u4ee5\u4e0a\u4f1a\u53d8\u6210\u84b8\u6c7d\u4e00\u6837\uff0c\u5c45\u91cc\u6e29\u5ea6\u5c31\u662f\u94c1\u7535\u6027\u7684”\u6cb8\u70b9”\u3002\u8d85\u8fc7\u5b83\uff0c\u6676\u683c\u7684\u70ed\u632f\u52a8\u5927\u5230\u8db3\u4ee5\u6253\u4e71\u7535\u7574\u7684\u6709\u5e8f\u6392\u5217\uff0c\u6781\u5316\u65b9\u5411\u53d8\u5f97\u968f\u673a\uff0c\u7535\u6ede\u56de\u7ebf\u6d88\u5931\u3002<\/p>\n\n\n\n

    \"\"<\/figure>\n\n\n\n

    \u25b2 \u949b\u9178\u94a1\uff08BaTiO\u2083\uff09\u7684\u76f8\u5bf9\u4ecb\u7535\u5e38\u6570\u4e0e\u6e29\u5ea6\u5173\u7cfb\u66f2\u7ebf\uff081kHz\u30013GHz \u4e24\u79cd\u9891\u7387\uff09\u3002\u6ce8\u610f\u6a2a\u8f74\u6e29\u5ea6 120\u00b0C \u9644\u8fd1\uff08Tc\uff09\uff0c\u4ecb\u7535\u5e38\u6570\u6025\u5267\u98d9\u5347\u5230 7000 \u4ee5\u4e0a\u2014\u2014\u8fd9\u5c31\u662f\u5c45\u91cc\u6e29\u5ea6\u5904\u7684”\u4ecb\u7535\u53cd\u5e38\u5cf0”\u3002\u4e00\u65e6\u8d8a\u8fc7 Tc\uff0c\u4ecb\u7535\u5e38\u6570\u548c\u635f\u8017\u90fd\u9aa4\u964d\uff0c\u610f\u5473\u7740\u94c1\u7535\u6027\u6d88\u5931\uff0c\u6750\u6599\u8fdb\u5165\u987a\u7535\u76f8\u3002\uff08\u56fe\u6e90\uff1a\u767e\u5ea6\u767e\u79d1 \/ \u7ecf\u5178 BaTiO\u2083 \u4ecb\u7535\u6570\u636e\uff09<\/em><\/p>\n\n\n\n

    \u4e0d\u540c\u6750\u6599\u7684\u5c45\u91cc\u6e29\u5ea6\u5dee\u5f02\u5f88\u5927\uff1a<\/p>\n\n\n\n

      \n
    • BaTiO\u2083\uff08\u949b\u9178\u94a1\uff09<\/strong>\uff1a\u7ea6120\u00b0C\u2014\u2014\u5ba4\u6e29\u4e0b\u662f\u94c1\u7535\u76f8\uff0c\u4f46\u6e29\u5ea6\u7a0d\u9ad8\u5c31\u4e0d\u884c\u4e86<\/li>\n\n\n\n
    • PZT\uff08\u9506\u949b\u9178\u94c5\uff09<\/strong>\uff1a\u7ea6250-400\u00b0C\uff08\u53d6\u51b3\u4e8ePb\/Zr\u6bd4\u4f8b\uff09\u2014\u2014\u5de5\u7a0b\u5e94\u7528\u7684\u4e3b\u529b<\/li>\n\n\n\n
    • PVDF\uff08\u805a\u504f\u6c1f\u4e59\u70ef\uff09<\/strong>\uff1a\u7ea6100\u00b0C\u2014\u2014\u67d4\u6027\u6750\u6599\uff0c\u9002\u5408\u53ef\u7a7f\u6234\u573a\u666f<\/li>\n<\/ul>\n\n\n\n

      \u5728\u8bbe\u8ba1MEMS\u5668\u4ef6\u65f6\uff0c\u5de5\u4f5c\u6e29\u5ea6\u5fc5\u987b\u4f4e\u4e8e\u5c45\u91cc\u6e29\u5ea6\uff0c\u8fd9\u662f\u6700\u57fa\u672c\u7684”\u7ea2\u7ebf”\u3002<\/p>\n\n\n\n

      1.4 \u538b\u7535\u6548\u5e94\u2014\u2014\u94c1\u7535\u7684”\u8fd0\u52a8\u5929\u8d4b”<\/h3>\n\n\n\n

      \u51e0\u4e4e\u6240\u6709\u94c1\u7535\u6750\u6599\u90fd\u5177\u6709\u538b\u7535\u6548\u5e94\uff08Piezoelectric Effect\uff09<\/strong>\uff1a\u65bd\u52a0\u5e94\u529b\u2192\u4ea7\u751f\u7535\u8377\uff08\u6b63\u538b\u7535\u6548\u5e94\uff09\uff0c\u65bd\u52a0\u7535\u573a\u2192\u4ea7\u751f\u5f62\u53d8\uff08\u9006\u538b\u7535\u6548\u5e94\uff09\u3002<\/p>\n\n\n\n

      \"\"<\/figure>\n\n\n\n

      \u25b2 \u6b63\u538b\u7535\u6548\u5e94\u539f\u7406\uff1a\u672a\u52a0\u538b\u529b\u65f6\u6676\u4f53\u5185\u90e8\u7535\u5076\u6781\u77e9\u968f\u673a\u5206\u5e03\uff0c\u5bf9\u5916\u4e0d\u663e\u7535\u6027\uff1b\u65bd\u52a0\u62c9\u4f38\u5916\u529b\u65f6\uff0c\u6676\u4f53\u88ab\u62c9\u957f\uff0c\u5076\u6781\u77e9\u8d8b\u4e8e\u4e00\u81f4\uff0c\u6676\u4f53\u4e24\u7aef\u4ea7\u751f\u7b49\u91cf\u5f02\u53f7\u7535\u8377\uff1b\u65bd\u52a0\u538b\u7f29\u5916\u529b\u65f6\uff0c\u7535\u8377\u6781\u6027\u53cd\u8f6c\u3002\u94c1\u7535\u6750\u6599\u540c\u65f6\u5177\u5907\u6b63\/\u9006\u538b\u7535\u6548\u5e94\uff0c\u662f MEMS \u9a71\u52a8\u5668\u7684\u7269\u7406\u57fa\u7840\u3002\uff08\u56fe\u6e90\uff1a\u54c8\u5c14\u6ee8\u82af\u660e\u5929\u79d1\u6280\uff09<\/em><\/p>\n\n\n\n

      \u8fd9\u610f\u5473\u7740\u94c1\u7535\u6750\u6599\u4e0d\u4ec5\u80fd”\u8bb0\u5fc6”\uff0c\u8fd8\u80fd”\u8fd0\u52a8”\u2014\u2014\u8fd9\u662f\u5b83\u5728MEMS\u9a71\u52a8\u5668\u4e2d\u5927\u653e\u5f02\u5f69\u7684\u6839\u672c\u539f\u56e0\u3002\u53ef\u4ee5\u8bf4\uff0c\u94c1\u7535\u6027\u8d4b\u4e88\u5b83\u5b58\u50a8\u80fd\u529b\uff0c\u538b\u7535\u6027\u8d4b\u4e88\u5b83\u9a71\u52a8\u80fd\u529b<\/strong>\uff0c\u4e24\u8005\u5408\u4e00\uff0c\u8ba9\u94c1\u7535\u6750\u6599\u6210\u4e3aMEMS\u9886\u57df\u7684”\u745e\u58eb\u519b\u5200”\u3002<\/p>\n\n\n\n

      1.5 \u5178\u578b\u94c1\u7535\u6750\u6599\u901f\u89c8<\/h3>\n\n\n\n
      \u6750\u6599<\/td>\u7c7b\u578b<\/td>\u5c45\u91cc\u6e29\u5ea6<\/td>\u6838\u5fc3\u4f18\u52bf<\/td>\u5178\u578b\u5e94\u7528<\/td><\/tr>
      PZT<\/strong>\uff08\u9506\u949b\u9178\u94c5\uff09<\/td>\u9676\u74f7<\/td>250-400\u00b0C<\/td>\u538b\u7535\u7cfb\u6570\u9ad8\u3001\u9a71\u52a8\u80fd\u529b\u5f3a<\/td>\u5fae\u6cf5\u3001\u5fae\u955c\u3001\u52a0\u901f\u5ea6\u8ba1<\/td><\/tr>
      BaTiO\u2083<\/strong>\uff08\u949b\u9178\u94a1\uff09<\/td>\u9676\u74f7<\/td>~120\u00b0C<\/td>\u7ecf\u5178\u6a21\u578b\u6750\u6599\u3001\u7814\u7a76\u6700\u5145\u5206<\/td>\u7535\u5bb9\u5668\u3001\u57fa\u7840\u7814\u7a76<\/td><\/tr>
      PVDF<\/strong>\uff08\u805a\u504f\u6c1f\u4e59\u70ef\uff09<\/td>\u9ad8\u5206\u5b50<\/td>~100\u00b0C<\/td>\u67d4\u6027\u3001\u53ef\u5f2f\u66f2\u3001\u751f\u7269\u76f8\u5bb9<\/td>\u53ef\u7a7f\u6234\u4f20\u611f\u5668\u3001\u80fd\u91cf\u6536\u96c6<\/td><\/tr>
      BST<\/strong>\uff08\u949b\u9178\u9536\u94a1\uff09<\/td>\u9676\u74f7<\/td>\u53ef\u8c03\uff08\u7ec4\u5206\u4f9d\u8d56\uff09<\/td>\u9ad8\u9891\u53ef\u8c03\u3001\u4f4e\u635f\u8017<\/td>\u5c04\u9891MEMS\u3001\u53ef\u8c03\u7535\u5bb9<\/td><\/tr>
      HfO\u2082<\/strong>\uff08\u6c27\u5316\u94ea\uff09<\/td>\u8584\u819c<\/td>>400\u00b0C<\/td>CMOS\u517c\u5bb9\u3001\u8d85\u8584\u94c1\u7535\u5c42<\/td>FeFET\u3001\u65b0\u578b\u94c1\u7535\u5b58\u50a8<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

      \u5176\u4e2d\uff0cPZT\u662fMEMS\u9886\u57df\u7684”\u8001\u5927\u54e5”\uff0c\u5360\u636e\u4e86\u5927\u534a\u58c1\u6c5f\u5c71\uff1b\u800cHfO\u2082\u5219\u662f\u8fd1\u5e74\u6765\u7684”\u65b0\u661f”\u2014\u2014\u5b83\u7684\u94c1\u7535\u6027\u5728\u8d85\u8584\u819c\u4e2d\u88ab\u53d1\u73b0\uff0c\u4e14\u4e0eCMOS\u5de5\u827a\u517c\u5bb9\uff0c\u4e3a\u94c1\u7535\u5b58\u50a8\u7684\u672a\u6765\u6253\u5f00\u4e86\u65b0\u5927\u95e8\u3002<\/p>\n\n\n\n

      \n\n\n\n

      \u4e8c\u3001MEMS\u4e2d\u7684\u94c1\u7535\uff1a\u4ece\u9a71\u52a8\u5230\u5b58\u50a8\u7684”\u5168\u5bb6\u6876”<\/h2>\n\n\n\n

      MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff0cMicro-Electro-Mechanical Systems\uff09\u662f\u5728\u5fae\u7c73\u5c3a\u5ea6\u4e0a\u5c06\u673a\u68b0\u7ed3\u6784\u4e0e\u7535\u5b50\u63a7\u5236\u96c6\u6210\u7684\u7cfb\u7edf\u3002\u94c1\u7535\u6750\u6599\u5728MEMS\u4e2d\u7684\u5e94\u7528\uff0c\u51e0\u4e4e\u8986\u76d6\u4e86”\u611f\u77e5\u2014\u9a71\u52a8\u2014\u5b58\u50a8\u2014\u4f9b\u80fd”\u7684\u5b8c\u6574\u94fe\u6761\u3002<\/p>\n\n\n\n

      2.1 \u538b\u7535\u9a71\u52a8\u2014\u2014MEMS\u7684”\u808c\u8089”<\/h3>\n\n\n\n

      \u94c1\u7535\u6750\u6599\u6700\u76f4\u89c2\u7684\u5e94\u7528\u5c31\u662f\u538b\u7535\u9a71\u52a8<\/strong>\uff1a\u7ed9\u4e00\u7247PZT\u8584\u819c\u901a\u4e0a\u7535\u538b\uff0c\u5b83\u5c31\u80fd\u4ea7\u751f\u5fae\u7c73\u4e43\u81f3\u7eb3\u7c73\u7ea7\u7684\u7cbe\u5bc6\u4f4d\u79fb\u3002<\/p>\n\n\n\n

      \u5fae\u6cf5\uff08Micro Pump\uff09<\/strong>\uff1a\u5728PZT\u8584\u819c\u4e0a\u65bd\u52a0\u4ea4\u53d8\u7535\u538b\uff0c\u8584\u819c\u5468\u671f\u6027\u5f2f\u66f2\uff0c\u50cf”\u547c\u5438”\u4e00\u6837\u9a71\u52a8\u6d41\u4f53\u6d41\u52a8\u3002\u8fd9\u79cd\u5fae\u6cf5\u53ef\u4ee5\u690d\u5165\u4eba\u4f53\uff0c\u5b9e\u73b0\u9776\u5411\u7ed9\u836f\u2014\u2014\u836f\u7269\u4ee5\u7cbe\u786e\u7684\u901f\u7387\u88ab\u63a8\u9001\u5230\u75c5\u7076\uff0c\u526f\u4f5c\u7528\u5927\u5e45\u964d\u4f4e\u3002<\/p>\n\n\n\n

      \"\"<\/figure>\n\n\n\n

      \u25b2 \u538b\u7535\u5fae\u6cf5\u7684 COMSOL \u4eff\u771f\u6a21\u578b\uff1a\u76f4\u5f84 15mm\uff0c\u539a\u5ea6 2.1mm + 250\u03bcm \u9488\u5934\u9635\u5217\u3002\u53ef\u4ee5\u770b\u5230 PZT \u538b\u7535\u5c42\u3001\u7845\u57fa\u5e95\u3001\u6d41\u4f53\u8154\u4f53\u7684\u591a\u5c42\u7ed3\u6784\u3002\u8fd9\u7c7b\u5fae\u6cf5\u53ef\u642d\u8f7d\u5fae\u9488\u9635\u5217\u900f\u76ae\u7ed9\u836f\uff0c\u5b9e\u73b0\u7cbe\u51c6\u836f\u7269\u9012\u9001\u3002\uff08\u56fe\u6e90\uff1aCOMSOL Multiphysics \u5b98\u65b9\u535a\u5ba2\uff09<\/em><\/p>\n\n\n\n

      \u5fae\u955c\uff08Micro Mirror\uff09<\/strong>\uff1aDMD\uff08\u6570\u5b57\u5fae\u955c\u5668\u4ef6\uff09\u662f\u6295\u5f71\u4eea\u548c\u5149\u523b\u673a\u7684\u6838\u5fc3\u3002\u6bcf\u4e2a\u5fae\u955c\u80cc\u540e\u90fd\u6709\u9a71\u52a8\u673a\u6784\uff0cPZT\u9a71\u52a8\u5668\u80fd\u5728\u5fae\u79d2\u7ea7\u54cd\u5e94\uff0c\u8ba9\u955c\u9762\u504f\u8f6c\u00b112\u00b0\u3002\u6570\u767e\u4e07\u4e2a\u5fae\u955c\u534f\u540c\u5de5\u4f5c\uff0c\u5c31\u6784\u6210\u4e86\u4f60\u770b\u5230\u7684\u753b\u9762\u3002<\/p>\n\n\n\n

      \u7eb3\u7c73\u5b9a\u4f4d\u53f0<\/strong>\uff1a\u5728\u534a\u5bfc\u4f53\u5149\u523b\u3001\u539f\u5b50\u529b\u663e\u5fae\u955c\uff08AFM\uff09\u4e2d\uff0c\u9700\u8981\u4e9a\u7eb3\u7c73\u7ea7\u7684\u5b9a\u4f4d\u7cbe\u5ea6\u3002PZT\u9a71\u52a8\u7684\u7eb3\u7c73\u5b9a\u4f4d\u53f0\uff0c\u51ed\u501f\u538b\u7535\u6750\u6599\u7684\u9006\u538b\u7535\u6548\u5e94\uff0c\u53ef\u4ee5\u5b9e\u73b0\u76ae\u7c73\uff0810\u207b\u00b9\u00b2 m\uff09\u7ea7\u7684\u4f4d\u79fb\u5206\u8fa8\u7387\u3002<\/p>\n\n\n\n

      2.2 \u94c1\u7535\u5b58\u50a8\u2014\u2014\u65ad\u7535\u4e0d\u4e22\u6570\u636e\u7684”\u6301\u4e45\u8bb0\u5fc6”<\/h3>\n\n\n\n

      FeRAM\uff08\u94c1\u7535\u968f\u673a\u5b58\u50a8\u5668\uff09<\/strong> \u5229\u7528\u94c1\u7535\u6750\u6599\u7684\u5269\u4f59\u6781\u5316\u6765\u5b58\u50a80\u548c1\u4e24\u79cd\u72b6\u6001\u3002\u4e0e\u4f20\u7edfFlash\u76f8\u6bd4\uff0cFeRAM\u6709\u51e0\u4e2a\u6740\u624b\u950f\uff1a<\/p>\n\n\n\n

        \n
      • \u5199\u5165\u901f\u5ea6\u6781\u5feb<\/strong>\uff1a\u7eb3\u79d2\u7ea7\u5199\u5165\uff0c\u6bd4Flash\u5feb1000\u500d\u4ee5\u4e0a<\/li>\n\n\n\n
      • \u5199\u5165\u8010\u4e45\u6027\u9ad8<\/strong>\uff1a\u53ef\u64e6\u519910\u00b9\u2070~10\u00b9\u2074\u6b21\uff0c\u8fdc\u8d85Flash\u768410\u2075\u6b21<\/li>\n\n\n\n
      • \u4f4e\u529f\u8017<\/strong>\uff1a\u5199\u5165\u7535\u538b\u53ea\u97001.5-3V\uff0c\u4e14\u5199\u5165\u8fc7\u7a0b\u51e0\u4e4e\u4e0d\u53d1\u70ed<\/li>\n\n\n\n
      • \u6297\u8f90\u5c04<\/strong>\uff1a\u5728\u592a\u7a7a\u7b49\u9ad8\u8f90\u5c04\u73af\u5883\u4e0b\u4ecd\u53ef\u9760\u5de5\u4f5c<\/li>\n<\/ul>\n\n\n\n
        \"\"<\/figure>\n\n\n\n

        \u25b2 \u5546\u7528 FeRAM \u82af\u7247\u5b9e\u7269\uff1aRamtron\uff08\u73b0 Cypress\uff09FM6124-QG \u4e8b\u4ef6\u6570\u636e\u8bb0\u5f55\u82af\u7247\u3002FeRAM \u51ed\u501f\u7eb3\u79d2\u7ea7\u5199\u5165\u300110\u00b9\u2074 \u6b21\u64e6\u5199\u5bff\u547d\u3001\u96f6\u529f\u8017\u6570\u636e\u4fdd\u6301\u7b49\u7279\u6027\uff0c\u5e7f\u6cdb\u7528\u4e8e\u6c7d\u8f66\u884c\u9a76\u8bb0\u5f55\u4eea\u3001\u667a\u80fd\u7535\u8868\u3001\u5de5\u4e1a\u63a7\u5236\u7b49\u9ad8\u53ef\u9760\u6027\u573a\u666f\u3002\uff08\u56fe\u6e90\uff1a\u8fbe\u76db\u5510 \/ Ramtron \u82af\u7247\u56fe\uff09<\/em><\/p>\n\n\n\n

        \u5f53\u7136\uff0cFeRAM\u4e5f\u6709\u77ed\u677f\u2014\u2014\u5b58\u50a8\u5bc6\u5ea6\u4e0d\u5982Flash\/NAND\uff0c\u4e14”\u8bfb”\u64cd\u4f5c\u662f\u7834\u574f\u6027\u7684\uff08\u8bfb\u540e\u9700\u8981\u91cd\u5199\uff09\u3002\u4f46\u5728\u6c7d\u8f66\u7535\u5b50\u3001\u667a\u80fd\u5361\u3001\u822a\u5929\u7b49\u5bf9\u53ef\u9760\u6027\u8981\u6c42\u6781\u9ad8\u7684\u573a\u666f\uff0cFeRAM\u662f\u4e0d\u53ef\u66ff\u4ee3\u7684\u9009\u62e9\u3002<\/p>\n\n\n\n

        \u8fd1\u5e74\u6765\uff0c\u57fa\u4e8eHfO\u2082\u94c1\u7535\u8584\u819c\u7684FeFET\uff08\u94c1\u7535\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff09<\/strong> \u6b63\u5728\u6210\u4e3a\u7814\u7a76\u70ed\u70b9\u2014\u2014\u5b83\u6709\u671b\u5b9e\u73b0\u975e\u7834\u574f\u6027\u8bfb\u53d6\uff0c\u4e14\u4e0eCMOS\u5de5\u827a\u5b8c\u5168\u517c\u5bb9\uff0c\u53ef\u80fd\u5f15\u9886\u4e0b\u4e00\u4ee3\u94c1\u7535\u5b58\u50a8\u7684\u53d8\u9769\u3002<\/p>\n\n\n\n

        2.3 \u4f20\u611f\u5668\u2014\u2014MEMS\u7684”\u795e\u7ecf\u672b\u68a2”<\/h3>\n\n\n\n

        \u538b\u7535\u52a0\u901f\u5ea6\u8ba1<\/strong>\uff1a\u5229\u7528\u6b63\u538b\u7535\u6548\u5e94\uff0c\u5c06\u673a\u68b0\u52a0\u901f\u5ea6\u8f6c\u5316\u4e3a\u7535\u4fe1\u53f7\u3002PZT\u52a0\u901f\u5ea6\u8ba1\u5728\u6c7d\u8f66\u5b89\u5168\u6c14\u56ca\u89e6\u53d1\u7cfb\u7edf\u4e2d\u5e7f\u6cdb\u5e94\u7528\u2014\u2014\u78b0\u649e\u77ac\u95f4\u4ea7\u751f\u7684\u52a0\u901f\u5ea6\u8ba9PZT\u4ea7\u751f\u7535\u8377\uff0c\u4fe1\u53f7\u88ab\u62fe\u53d6\u540e\u89e6\u53d1\u6c14\u56ca\u5f39\u51fa\u3002\u54cd\u5e94\u901f\u5ea6\u4e4b\u5feb\uff0c\u662f\u5176\u4ed6\u4f20\u611f\u539f\u7406\u96be\u4ee5\u4f01\u53ca\u7684\u3002<\/p>\n\n\n\n

        \u58f0\u8868\u9762\u6ce2\uff08SAW\uff09\u4f20\u611f\u5668<\/strong>\uff1a\u5728\u538b\u7535\u57fa\u5e95\u4e0a\u6fc0\u53d1\u58f0\u8868\u9762\u6ce2\uff0c\u5f53\u73af\u5883\u6e29\u5ea6\u3001\u538b\u529b\u6216\u6c14\u4f53\u6d53\u5ea6\u53d8\u5316\u65f6\uff0c\u58f0\u6ce2\u7684\u4f20\u64ad\u7279\u6027\uff08\u9891\u7387\u3001\u76f8\u4f4d\u3001\u8870\u51cf\uff09\u4f1a\u53d1\u751f\u53d8\u5316\uff0c\u636e\u6b64\u5b9e\u73b0\u9ad8\u7075\u654f\u5ea6\u4f20\u611f\u3002SAW\u4f20\u611f\u5668\u65e0\u9700\u7535\u6e90\uff0c\u53ef\u901a\u8fc7\u65e0\u7ebf\u5c04\u9891\u8bfb\u51fa\u2014\u2014\u8fd9\u5728\u6076\u52a3\u73af\u5883\u76d1\u63a7\u4e2d\u6781\u5177\u4f18\u52bf\u3002<\/p>\n\n\n\n

        2.4 \u80fd\u91cf\u6536\u96c6\u2014\u2014\u4ece\u632f\u52a8\u4e2d”\u8585”\u7535<\/h3>\n\n\n\n

        \u73af\u5883\u4e2d\u5230\u5904\u662f\u632f\u52a8\u2014\u2014\u673a\u5668\u8fd0\u8f6c\u3001\u4eba\u4f53\u8fd0\u52a8\u3001\u8f66\u8f86\u884c\u9a76\u2026\u2026PVDF\u8584\u819c\u53ef\u4ee5\u5c06\u8fd9\u4e9b\u673a\u68b0\u632f\u52a8\u8f6c\u5316\u4e3a\u7535\u80fd\uff0c\u4e3a\u4f4e\u529f\u8017\u4f20\u611f\u5668\u4f9b\u7535\u3002\u867d\u7136\u8f93\u51fa\u529f\u7387\u4e0d\u5927\uff08\u03bcW-mW\u7ea7\uff09\uff0c\u4f46\u5bf9\u4e8e\u90a3\u4e9b”\u88c5\u4e0a\u5c31\u4e0d\u7ba1”\u7684\u7269\u8054\u7f51\u4f20\u611f\u5668\u8282\u70b9\u6765\u8bf4\uff0c\u8fd9\u53ef\u80fd\u662f\u6bd4\u7535\u6c60\u66f4\u4f18\u7684\u65b9\u6848\u2014\u2014\u6ca1\u6709\u7535\u6c60\uff0c\u5c31\u6ca1\u6709\u66f4\u6362\u7535\u6c60\u7684\u95ee\u9898<\/strong>\u3002<\/p>\n\n\n\n

        \n\n\n\n

        \u4e09\u3001\u4eff\u771f\u6a21\u578b\uff1a\u5728\u8ba1\u7b97\u673a\u91cc”\u590d\u523b”\u94c1\u7535\u884c\u4e3a<\/h2>\n\n\n\n

        \u5728\u52a8\u624b\u505a\u5668\u4ef6\u4e4b\u524d\uff0c\u5de5\u7a0b\u5e08\u4eec\u9700\u8981\u5148\u7528\u4eff\u771f\u6765\u9884\u6d4b\u94c1\u7535\u6750\u6599\u7684\u884c\u4e3a\u3002\u4f46\u94c1\u7535\u6750\u6599\u7684\u4eff\u771f\u5e76\u4e0d\u7b80\u5355\u2014\u2014\u5b83\u7684\u6838\u5fc3\u7279\u5f81\u662f\u8fdf\u6ede<\/strong>\uff08Hysteresis\uff09\uff0c\u5373\u8f93\u51fa\u4e0d\u4ec5\u53d6\u51b3\u4e8e\u5f53\u524d\u8f93\u5165\uff0c\u8fd8\u53d6\u51b3\u4e8e\u5386\u53f2\u8def\u5f84\u3002\u8fd9\u610f\u5473\u7740\u94c1\u7535\u6750\u6599\u662f\u4e00\u4e2a”\u6709\u8bb0\u5fc6”\u7684\u7cfb\u7edf\uff0c\u4f20\u7edf\u7684\u7ebf\u6027\u672c\u6784\u5173\u7cfb\uff08\u5982\u7b80\u5355\u7684\u5e94\u529b-\u5e94\u53d8\u5173\u7cfb\uff09\u5b8c\u5168\u4e0d\u591f\u7528\u3002<\/p>\n\n\n\n

        \u4e0d\u540c\u7684\u6a21\u578b\uff0c\u672c\u8d28\u4e0a\u662f\u5728”\u8bb0\u5fc6\u7684\u7cbe\u5ea6”\u548c”\u8ba1\u7b97\u7684\u4ee3\u4ef7”\u4e4b\u95f4\u505a\u4e0d\u540c\u7684\u6743\u8861\u3002<\/p>\n\n\n\n

        3.1 Landau-Devonshire\u7406\u8bba\u2014\u2014\u4ece\u70ed\u529b\u5b66\u51fa\u53d1\u7684”\u5927\u7edf\u4e00”<\/h3>\n\n\n\n

        Landau-Devonshire\u552f\u8c61\u7406\u8bba<\/strong>\u662f\u4ece\u70ed\u529b\u5b66\u51fa\u53d1\uff0c\u5c06\u94c1\u7535\u4f53\u7684Gibbs\u81ea\u7531\u80fd\u5c55\u5f00\u4e3a\u6781\u5316P\u7684\u5e42\u7ea7\u6570\uff1a<\/p>\n\n\n\n

        \"\"\/<\/figure>\n\n\n\n

        \u5176\u4e2d\uff0c\u03b1\u4e0e\u6e29\u5ea6\u76f8\u5173\uff1a\u03b1 = (T \u2212 Tc)\/(2\u03b5\u2080C)\uff0c\u5f53T < Tc\u65f6\u03b1\u4e3a\u8d1f\uff0c\u81ea\u7531\u80fd\u5728\u975e\u96f6P\u5904\u51fa\u73b0\u6781\u5c0f\u503c\uff0c\u94c1\u7535\u6001\u81ea\u7136\u6d8c\u73b0\u3002<\/p>\n\n\n\n

        \u8fd9\u4e2a\u7406\u8bba\u7684\u7cbe\u5999\u4e4b\u5904\u5728\u4e8e\uff1a\u4ec5\u4ec5\u901a\u8fc7\u4e00\u4e2a\u6e29\u5ea6\u76f8\u5173\u7684\u7cfb\u6570\u03b1\uff0c\u5c31\u81ea\u7136\u5730\u89e3\u91ca\u4e86\u94c1\u7535\u76f8\u53d8<\/strong>\u3002\u5b83\u50cf\u4e00\u4e2a”\u70ed\u529b\u5b66\u5f00\u5173”\u2014\u2014\u6e29\u5ea6\u4f4e\u4e8eTc\uff0c\u7cfb\u7edf”\u9009\u62e9”\u94c1\u7535\u6001\uff1b\u6e29\u5ea6\u9ad8\u4e8eTc\uff0c\u7cfb\u7edf”\u5207\u6362”\u4e3a\u987a\u7535\u6001\u3002<\/p>\n\n\n\n

        \u4f18\u70b9<\/strong>\uff1a\u7269\u7406\u56fe\u50cf\u6e05\u6670\uff0c\u80fd\u63cf\u8ff0\u76f8\u53d8\u884c\u4e3a\uff1b\u53ef\u4ee5\u63a8\u5bfc\u51faP-E\u5173\u7cfb\u3001\u4ecb\u7535\u5e38\u6570-\u6e29\u5ea6\u5173\u7cfb\u7b49\u5b8f\u89c2\u6027\u8d28\uff1b\u53c2\u6570\u6709\u660e\u786e\u7684\u7269\u7406\u610f\u4e49\uff0c\u53ef\u4ece\u5b9e\u9a8c\u6807\u5b9a\u3002<\/p>\n\n\n\n

        \u5c40\u9650<\/strong>\uff1a\u63cf\u8ff0\u7684\u662f\u5b8f\u89c2\u5747\u5300<\/strong>\u7684\u6781\u5316\u884c\u4e3a\uff0c\u65e0\u6cd5\u6355\u6349\u7535\u7574\u7ed3\u6784\uff1b\u5bf9\u7535\u6ede\u56de\u7ebf\u7684\u63cf\u8ff0\u662f”\u7406\u60f3\u5316”\u7684\uff0c\u4e0e\u5b9e\u9a8c\u56de\u7ebf\u6709\u5dee\u8ddd\uff1b\u96be\u4ee5\u5904\u7406\u7574\u58c1\u8fd0\u52a8\u7b49\u5fae\u89c2\u52a8\u529b\u5b66\u3002<\/p>\n\n\n\n

        \u9002\u7528\u573a\u666f<\/strong>\uff1a\u5668\u4ef6\u7ea7\u5feb\u901f\u4f30\u7b97\u3001\u76f8\u53d8\u6e29\u5ea6\u9884\u6d4b\u3001\u6750\u6599\u7b5b\u9009\u7684\u7b2c\u4e00\u6b65\u3002<\/p>\n\n\n\n

        3.2 Preisach\u6a21\u578b\u2014\u2014\u8fdf\u6ede\u7684”\u8d85\u7ea7\u7b97\u5b50”<\/h3>\n\n\n\n

        Preisach\u6a21\u578b<\/strong>\u6700\u521d\u662f\u4e3a\u94c1\u78c1\u6750\u6599\u63d0\u51fa\u7684\uff0c\u540e\u6765\u88ab”\u79fb\u690d”\u5230\u94c1\u7535\u9886\u57df\u3002\u5b83\u7684\u6838\u5fc3\u601d\u60f3\u975e\u5e38\u4f18\u96c5\uff1a\u5c06\u590d\u6742\u7684\u8fdf\u6ede\u56de\u7ebf\u5206\u89e3\u4e3a\u65e0\u7a77\u591a\u4e2a\u7b80\u5355\u7684”\u57fa\u672c\u8fdf\u6ede\u7b97\u5b50”\u7684\u53e0\u52a0<\/strong>\u3002<\/p>\n\n\n\n

        \u6bcf\u4e2a\u57fa\u672c\u7b97\u5b50\u5c31\u662f\u4e00\u4e2a\u65b9\u5f62\u7684\u5b50\u56de\u7ebf\u2014\u2014\u5f53\u8f93\u5165\u8d85\u8fc7”\u4e0a\u7ebf”\u65f6\u8f93\u51fa\u7ffb\u8f6c\uff0c\u4f4e\u4e8e”\u4e0b\u7ebf”\u65f6\u7ffb\u56de\u3002\u4e0d\u540c\u7b97\u5b50\u6709\u4e0d\u540c\u7684\u7ffb\u8f6c\u9608\u503c\uff0c\u628a\u5b83\u4eec\u5168\u90e8\u53e0\u52a0\u8d77\u6765\uff0c\u5c31\u5f97\u5230\u4e86\u771f\u5b9e\u7684\u7535\u6ede\u56de\u7ebf\u3002<\/p>\n\n\n\n

        \u60f3\u8c61\u4e00\u4e0b\uff1a\u94c1\u7535\u6750\u6599\u5185\u90e8\u6709\u65e0\u6570\u4e2a”\u5c0f\u5f00\u5173”\uff0c\u6bcf\u4e2a\u5c0f\u5f00\u5173\u6709\u81ea\u5df1\u7684\u89e6\u53d1\u9608\u503c\u3002\u6574\u4e2a\u6750\u6599\u7684\u5b8f\u89c2\u884c\u4e3a\uff0c\u5c31\u662f\u6240\u6709\u5c0f\u5f00\u5173\u72b6\u6001\u7684\u52a0\u6743\u5e73\u5747\u3002Preisach\u6a21\u578b\u8981\u505a\u7684\uff0c\u5c31\u662f\u627e\u5230\u8fd9\u4e9b”\u5c0f\u5f00\u5173”\u7684\u5206\u5e03\u51fd\u6570\uff08\u5373Preisach\u5bc6\u5ea6\u51fd\u6570\uff09\u3002<\/p>\n\n\n\n

        \u4f18\u70b9<\/strong>\uff1a\u7cbe\u5ea6\u6781\u9ad8<\/strong>\uff0c\u53ea\u8981\u5bc6\u5ea6\u51fd\u6570\u6807\u5b9a\u5f97\u5f53\uff0c\u53ef\u4ee5\u7cbe\u786e\u590d\u73b0\u4efb\u610f\u590d\u6742\u7684\u7535\u6ede\u56de\u7ebf\uff1b\u6570\u5b66\u6846\u67b6\u6210\u719f\uff0c\u6709\u7cfb\u7edf\u7684\u53c2\u6570\u8fa8\u8bc6\u65b9\u6cd5\uff1b\u53ef\u4ee5\u5904\u7406\u975e\u5c0f\u4fe1\u53f7\u3001\u975e\u7ebf\u6027\u7684\u52a8\u6001\u884c\u4e3a\u3002<\/p>\n\n\n\n

        \u5c40\u9650<\/strong>\uff1a\u53c2\u6570\u6807\u5b9a\u590d\u6742\uff1b\u6ca1\u6709\u7269\u7406\u76f4\u89c9<\/strong>\u2014\u2014\u5b83\u662f\u4e00\u4e2a”\u9ed1\u7bb1”\uff1b\u8ba1\u7b97\u91cf\u968f\u7b97\u5b50\u6570\u91cf\u589e\u52a0\u800c\u589e\u957f\uff1b\u96be\u4ee5\u4e0e\u5176\u4ed6\u7269\u7406\u573a\uff08\u529b\u5b66\u3001\u70ed\u5b66\uff09\u8026\u5408\u3002<\/p>\n\n\n\n

        \u9002\u7528\u573a\u666f<\/strong>\uff1a\u9700\u8981\u7cbe\u786e\u8fdf\u6ede\u5efa\u6a21\u7684\u9a71\u52a8\u5668\u63a7\u5236\u3001FeRAM\u8bfb\u5199\u7535\u8def\u8bbe\u8ba1\u3002<\/p>\n\n\n\n

        3.3 Jiles-Atherton\u6a21\u578b\u2014\u2014\u7269\u7406\u9a71\u52a8\u7684\u8fdf\u6ede\u63cf\u8ff0<\/h3>\n\n\n\n

        Jiles-Atherton\u6a21\u578b<\/strong>\uff08J-A\u6a21\u578b\uff09\u540c\u6837\u6e90\u81ea\u94c1\u78c1\u9886\u57df\u3002\u4e0ePreisach\u7684\u7eaf\u6570\u5b66\u8def\u7ebf\u4e0d\u540c\uff0cJ-A\u6a21\u578b\u8bd5\u56fe\u4ece\u7269\u7406\u673a\u5236\u51fa\u53d1\u63cf\u8ff0\u8fdf\u6ede\uff1a<\/p>\n\n\n\n

          \n
        • \u65e0\u6ede\u56de\uff08Anhysteretic\uff09\u6781\u5316<\/strong>\uff1a\u7406\u60f3\u60c5\u51b5\u4e0b\uff0c\u6750\u6599\u5728\u65e0\u7f3a\u9677\u3001\u65e0\u9489\u624e\u65f6\u7684\u54cd\u5e94\uff08\u7528Langevin\u51fd\u6570\u63cf\u8ff0\uff09<\/li>\n\n\n\n
        • \u8fdf\u6ede\u6765\u6e90<\/strong>\uff1a\u7574\u58c1\u88ab\u7f3a\u9677”\u9489\u624e”\uff08Pinning\uff09\uff0c\u5bfc\u81f4\u4e0d\u53ef\u9006\u7684\u7574\u58c1\u8fd0\u52a8<\/li>\n\n\n\n
        • \u7528\u4e00\u4e2a\u9489\u624e\u53c2\u6570k<\/strong>\u6765\u91cf\u5316\u7574\u58c1\u8fd0\u52a8\u7684\u963b\u529b\u2014\u2014k\u8d8a\u5927\uff0c\u8fdf\u6ede\u8d8a\u660e\u663e<\/li>\n<\/ul>\n\n\n\n

          \u4f18\u70b9<\/strong>\uff1a\u53c2\u6570\u6709\u7269\u7406\u542b\u4e49\uff08\u9489\u624e\u5f3a\u5ea6\u3001\u7574\u95f4\u8026\u5408\u7b49\uff09\uff1b\u53c2\u6570\u6570\u91cf\u5c11\uff08\u901a\u5e385\u4e2a\uff09\uff0c\u6bd4Preisach\u66f4\u5bb9\u6613\u6807\u5b9a\uff1b\u53ef\u4ee5\u89e3\u91ca\u8fdf\u6ede\u7684\u7269\u7406\u6765\u6e90\u3002<\/p>\n\n\n\n

          \u5c40\u9650<\/strong>\uff1a\u7cbe\u5ea6\u4e0d\u5982Preisach\uff0c\u7279\u522b\u662f\u5728\u56de\u7ebf\u5f62\u72b6\u7684\u7ec6\u8282\u4e0a\uff1b\u6700\u521d\u4e3a\u94c1\u78c1\u5f00\u53d1\uff0c”\u79fb\u690d”\u5230\u94c1\u7535\u65f6\u67d0\u4e9b\u5047\u8bbe\u9700\u8981\u8c03\u6574\uff1b\u5bf9\u975e\u5bf9\u79f0\u56de\u7ebf\u7684\u63cf\u8ff0\u80fd\u529b\u6709\u9650\u3002<\/p>\n\n\n\n

          \u9002\u7528\u573a\u666f<\/strong>\uff1a\u9700\u8981\u7269\u7406\u76f4\u89c9\u7684\u521d\u6b65\u8bbe\u8ba1\u3001\u6559\u5b66\u6f14\u793a\u3001\u5feb\u901f\u4f30\u7b97\u3002<\/p>\n\n\n\n

          3.4 \u76f8\u573a\u6cd5\uff08Phase Field\uff09\u2014\u2014”\u770b\u89c1”\u7535\u7574\u7684\u6f14\u5316<\/h3>\n\n\n\n

          \u524d\u9762\u4e09\u4e2a\u6a21\u578b\u63cf\u8ff0\u7684\u90fd\u662f\u5b8f\u89c2\u6781\u5316\u884c\u4e3a\uff0c\u770b\u4e0d\u5230”\u7535\u7574”\u2014\u2014\u5c31\u50cf\u53ea\u770b\u5230\u6d77\u9762\u7684\u6ce2\u6d6a\uff0c\u770b\u4e0d\u5230\u6d77\u6c34\u5185\u90e8\u7684\u5bf9\u6d41\u3002<\/p>\n\n\n\n

          \u76f8\u573a\u6cd5<\/strong>\u5219\u4e0d\u540c\uff1a\u5b83\u5728\u7a7a\u95f4\u7f51\u683c\u4e0a\u6c42\u89e3\u6bcf\u4e2a\u70b9\u7684\u6781\u5316\u77e2\u91cf\u573aP(x, y, z, t)\uff0c\u8ba9\u7535\u7574\u7ed3\u6784\u53ca\u5176\u6f14\u5316\u8fc7\u7a0b”\u8089\u773c\u53ef\u89c1”\u3002<\/p>\n\n\n\n

          \u5176\u6838\u5fc3\u662f\u6c42\u89e3\u65f6\u95f4\u4f9d\u8d56\u7684Ginzburg-Landau\u65b9\u7a0b\uff08TDGL\uff09<\/strong>\uff1a<\/p>\n\n\n\n

          \"\"\/<\/figure>\n\n\n\n

          \u5176\u4e2dF\u662f\u5305\u542b\u68af\u5ea6\u9879\u7684\u81ea\u7531\u80fd\u6cdb\u51fd\uff0cL\u662f\u52a8\u529b\u5b66\u7cfb\u6570\u3002\u8fd9\u4e2a\u65b9\u7a0b\u8ba9\u6781\u5316\u4ece\u9ad8\u81ea\u7531\u80fd\u6001”\u6d41\u52a8”\u5230\u4f4e\u81ea\u7531\u80fd\u6001\u2014\u2014\u5c31\u50cf\u6c34\u4ece\u9ad8\u5904\u6d41\u5411\u4f4e\u5904\uff0c\u81ea\u7136\u5730\u5f62\u6210\u7535\u7574\u7ed3\u6784\u3002<\/p>\n\n\n\n

          \u4f18\u70b9<\/strong>\uff1a\u7269\u7406\u4fdd\u771f\u5ea6\u6700\u9ad8<\/strong>\uff0c\u80fd\u6355\u6349\u7535\u7574\u6210\u6838\u3001\u957f\u5927\u3001\u5408\u5e76\u7684\u5168\u8fc7\u7a0b\uff1b\u53ef\u4ee5\u7814\u7a76\u7574\u58c1\u8fd0\u52a8\u3001\u7f3a\u9677\u6548\u5e94\u3001\u5c3a\u5bf8\u6548\u5e94\u7b49\u5fae\u89c2\u673a\u5236\uff1b\u4e09\u7ef4\u4eff\u771f\u53ef\u4ee5\u9884\u6d4b\u5fae\u7eb3\u5668\u4ef6\u7684\u6781\u5316\u5206\u5e03\u3002<\/p>\n\n\n\n

          \u5c40\u9650<\/strong>\uff1a\u8ba1\u7b97\u91cf\u6781\u5927<\/strong>\uff0c\u4e09\u7ef4\u76f8\u573a\u4eff\u771f\u9700\u8981\u6c42\u89e3\u6570\u767e\u4e07\u4e2a\u81ea\u7531\u5ea6\uff0c\u901a\u5e38\u9700\u8981\u8d85\u7b97\uff1b\u65f6\u95f4\u5c3a\u5ea6\u53d7\u9650\u2014\u2014\u6a21\u62df\u65f6\u95f4\u901a\u5e38\u5728ns-\u03bcs\u91cf\u7ea7\uff0c\u96be\u4ee5\u8986\u76d6\u5b8f\u89c2\u65f6\u95f4\uff1b\u53c2\u6570\u6807\u5b9a\u9700\u8981\u7b2c\u4e00\u6027\u539f\u7406\u8ba1\u7b97\u6216\u7cbe\u7ec6\u5b9e\u9a8c\u3002<\/p>\n\n\n\n

          \u9002\u7528\u573a\u666f<\/strong>\uff1a\u65b0\u6750\u6599\u7684\u7535\u7574\u884c\u4e3a\u7814\u7a76\u3001\u5fae\u7eb3\u5668\u4ef6\u7684\u5931\u6548\u673a\u7406\u5206\u6790\u3001\u8bba\u6587\u7ea7\u7814\u7a76\u3002<\/p>\n\n\n\n

          3.5 \u6a21\u578b\u9009\u62e9\u6307\u5357<\/h3>\n\n\n\n
          \u6a21\u578b<\/td>\u7cbe\u5ea6<\/td>\u8ba1\u7b97\u4ee3\u4ef7<\/td>\u7269\u7406\u76f4\u89c9<\/td>\u591a\u573a\u8026\u5408<\/td>\u5178\u578b\u7528\u9014<\/td><\/tr>
          Landau-Devonshire<\/td>\u4e2d<\/td>\u4f4e<\/td>\u9ad8<\/td>\u53ef\u5b9e\u73b0<\/td>\u76f8\u53d8\u9884\u6d4b\u3001\u5feb\u901f\u4f30\u7b97<\/td><\/tr>
          Preisach<\/td>\u9ad8<\/td>\u4e2d<\/td>\u4f4e<\/td>\u56f0\u96be<\/td>\u7cbe\u786e\u8fdf\u6ede\u5efa\u6a21\u3001\u63a7\u5236\u8bbe\u8ba1<\/td><\/tr>
          Jiles-Atherton<\/td>\u4e2d<\/td>\u4f4e<\/td>\u4e2d<\/td>\u53ef\u6269\u5c55<\/td>\u521d\u6b65\u8bbe\u8ba1\u3001\u7269\u7406\u7406\u89e3<\/td><\/tr>
          \u76f8\u573a\u6cd5<\/td>\u6700\u9ad8<\/td>\u6781\u9ad8<\/td>\u6700\u9ad8<\/td>\u53ef\u5b9e\u73b0<\/td>\u7535\u7574\u7814\u7a76\u3001\u8bba\u6587\u4eff\u771f<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
          \n

          \u4e00\u53e5\u8bdd\u603b\u7ed3<\/strong>\uff1a\u5feb\u901f\u9009\u578b\u7528Landau\uff0c\u7cbe\u786e\u5efa\u6a21\u7528Preisach\uff0c\u7269\u7406\u7406\u89e3\u7528J-A\uff0c”\u770b\u89c1”\u7535\u7574\u7528\u76f8\u573a\u3002<\/p>\n<\/blockquote>\n\n\n\n

          \n\n\n\n

          \u56db\u3001\u6709\u9650\u5143\u4eff\u771f\u5b9e\u6218\uff1a\u8ba9\u94c1\u7535”\u6d3b”\u5728\u4f60\u7684\u5c4f\u5e55\u4e0a<\/h2>\n\n\n\n

          \u7406\u8bba\u6a21\u578b\u8bb2\u5b8c\u4e86\uff0c\u63a5\u4e0b\u6765\u662f\u5de5\u7a0b\u5e08\u4eec\u6700\u5173\u5fc3\u7684\u5b9e\u64cd\u95ee\u9898\uff1a\u600e\u4e48\u5728\u6709\u9650\u5143\u8f6f\u4ef6\u91cc\u771f\u7684\u8dd1\u8d77\u6765\uff1f<\/strong><\/p>\n\n\n\n

          4.1 \u5546\u4e1a\u8f6f\u4ef6\u7684\u9009\u62e9<\/h3>\n\n\n\n

          \u76ee\u524d\u4e3b\u6d41\u7684\u4e09\u5927\u6709\u9650\u5143\u8f6f\u4ef6\u5bf9\u94c1\u7535\/\u538b\u7535\u4eff\u771f\u7684\u652f\u6301\u7a0b\u5ea6\u5404\u6709\u4e0d\u540c\uff1a<\/p>\n\n\n\n

          COMSOL Multiphysics<\/strong> \u2b50\u63a8\u8350<\/p>\n\n\n\n

            \n
          • \u5185\u7f6e”\u538b\u7535\u6548\u5e94”\u7269\u7406\u573a\u63a5\u53e3\uff0c\u76f4\u63a5\u652f\u6301\u529b-\u7535\u8026\u5408<\/li>\n\n\n\n
          • \u652f\u6301\u81ea\u5b9a\u4e49\u672c\u6784\u5173\u7cfb\u2014\u2014\u53ef\u4ee5\u901a\u8fc7”\u5f31\u5f62\u5f0f”\u6216”\u5916\u90e8\u6750\u6599”\u63a5\u53e3\u5b9e\u73b0Preisach\u7b49\u8fdf\u6ede\u6a21\u578b<\/li>\n\n\n\n
          • \u591a\u7269\u7406\u573a\u8026\u5408\u662fCOMSOL\u7684\u5f3a\u9879\uff0c\u529b-\u7535-\u70ed-\u6d41\u4f53\u7684\u7ec4\u5408\u975e\u5e38\u65b9\u4fbf<\/li>\n\n\n\n
          • \u540e\u5904\u7406\u548c\u53ef\u89c6\u5316\u76f4\u89c2<\/li>\n<\/ul>\n\n\n\n

            ANSYS<\/strong><\/p>\n\n\n\n

              \n
            • Mechanical\u6a21\u5757\u652f\u6301\u538b\u7535\u5206\u6790\uff08Static\/Transient\/Harmonic\uff09<\/li>\n\n\n\n
            • APDL\u6216Python\u811a\u672c\u53ef\u4ee5\u5b9e\u73b0\u81ea\u5b9a\u4e49\u6750\u6599\u6a21\u578b<\/li>\n\n\n\n
            • \u5728\u7ed3\u6784-\u7535\u78c1\u8026\u5408\u65b9\u9762\u9700\u8981\u901a\u8fc7\u8026\u5408\u573a\u6a21\u5757\u6865\u63a5<\/li>\n\n\n\n
            • \u9002\u5408\u5927\u578b\u7ed3\u6784\u95ee\u9898<\/li>\n<\/ul>\n\n\n\n

              Abaqus<\/strong><\/p>\n\n\n\n

                \n
              • \u901a\u8fc7\u7528\u6237\u5b50\u7a0b\u5e8f\uff08UMAT\/VUMAT\uff09\u5b9e\u73b0\u538b\u7535\/\u94c1\u7535\u672c\u6784<\/li>\n\n\n\n
              • \u7075\u6d3b\u6027\u6781\u9ad8\uff0c\u4f46\u9700\u8981\u81ea\u5df1\u5199\u6750\u6599\u6a21\u578b\u4ee3\u7801<\/li>\n\n\n\n
              • \u5728\u975e\u7ebf\u6027\u529b\u5b66\u65b9\u9762\u4f18\u52bf\u660e\u663e<\/li>\n\n\n\n
              • \u9002\u5408\u6709\u7f16\u7a0b\u80fd\u529b\u7684\u7528\u6237\u6df1\u5ea6\u5b9a\u5236<\/li>\n<\/ul>\n\n\n\n
                \n

                \ud83d\udca1 \u65b0\u624b\u5efa\u8bae<\/strong>\uff1a\u4eceCOMSOL\u8d77\u6b65\uff0c\u5b83\u7684\u56fe\u5f62\u5316\u754c\u9762\u548c\u5185\u7f6e\u7269\u7406\u573a\u63a5\u53e3\u8ba9\u5b66\u4e60\u66f2\u7ebf\u66f4\u5e73\u7f13\u3002\u7b49\u4f60\u6709\u7ecf\u9a8c\u540e\uff0c\u518d\u6839\u636e\u9700\u8981\u8f6c\u5411ANSYS\u6216Abaqus\u3002<\/p>\n<\/blockquote>\n\n\n\n

                4.2 \u5efa\u6a21\u6d41\u7a0b\u516d\u6b65\u8d70<\/h3>\n\n\n\n

                \u4e0d\u7ba1\u7528\u4ec0\u4e48\u8f6f\u4ef6\uff0c\u94c1\u7535MEMS\u4eff\u771f\u7684\u6838\u5fc3\u6d41\u7a0b\u90fd\u662f\u7c7b\u4f3c\u7684\uff1a<\/p>\n\n\n\n

                Step 1\uff1a\u6750\u6599\u53c2\u6570\u6807\u5b9a<\/strong><\/p>\n\n\n\n

                \u8fd9\u662f\u6700\u5173\u952e\u4e5f\u6700\u5bb9\u6613\u88ab\u5ffd\u89c6\u7684\u4e00\u6b65\u3002\u94c1\u7535\u6750\u6599\u7684\u672c\u6784\u53c2\u6570\u51b3\u5b9a\u4e86\u4eff\u771f\u7684”\u7075\u9b42”\u2014\u2014\u5783\u573e\u8fdb\uff0c\u5783\u573e\u51fa\u3002<\/p>\n\n\n\n

                \u5bf9\u4e8ePZT\uff0c\u4f60\u9700\u8981\u81f3\u5c11\u51c6\u5907\u4ee5\u4e0b\u53c2\u6570\uff1a<\/p>\n\n\n\n

                  \n
                • \u5f39\u6027\u5e38\u6570\u77e9\u9635<\/strong>\uff08cE\u6216sE\uff09\uff1a6\u00d76\u77e9\u9635\uff0c\u63cf\u8ff0\u529b\u5b66\u884c\u4e3a<\/li>\n\n\n\n
                • \u538b\u7535\u5e38\u6570\u77e9\u9635<\/strong>\uff08d\u6216e\uff09\uff1a3\u00d76\u77e9\u9635\uff0c\u63cf\u8ff0\u529b-\u7535\u8026\u5408\u5f3a\u5ea6<\/li>\n\n\n\n
                • \u4ecb\u7535\u5e38\u6570\u77e9\u9635<\/strong>\uff08\u03b5T\u6216\u03b5S\uff09\uff1a3\u00d73\u77e9\u9635\uff0c\u63cf\u8ff0\u7535\u5b66\u54cd\u5e94<\/li>\n\n\n\n
                • \u5bc6\u5ea6\u03c1<\/strong>\u3001\u963b\u5c3c\u53c2\u6570<\/strong><\/li>\n<\/ul>\n\n\n\n

                  \u8fd9\u4e9b\u53c2\u6570\u53ef\u4ee5\u4ece\u6750\u6599\u4f9b\u5e94\u5546\u7684\u6570\u636e\u624b\u518c\u83b7\u53d6\uff08\u5982PI Ceramic\u3001Morgan Electro Ceramics\u7b49\uff09\uff0c\u4e5f\u53ef\u4ee5\u4ece\u6587\u732e\u4e2d\u67e5\u627e\u3002\u5bf9\u4e8e\u8584\u819cPZT\uff0c\u53c2\u6570\u53ef\u80fd\u4e0e\u4f53\u6750\u6599\u6709\u663e\u8457\u5dee\u5f02\u2014\u2014\u8584\u819c\u7684\u6b8b\u4f59\u5e94\u529b\u3001\u6676\u7c92\u53d6\u5411\u3001\u754c\u9762\u6548\u5e94\u90fd\u4f1a\u6539\u53d8\u672c\u6784\u884c\u4e3a\uff0c\u52a1\u5fc5\u6ce8\u610f\u3002<\/p>\n\n\n\n

                  Step 2\uff1a\u51e0\u4f55\u5efa\u6a21<\/strong><\/p>\n\n\n\n

                    \n
                  • 2D\u8f74\u5bf9\u79f0 vs 3D\uff1a\u5982\u679c\u5668\u4ef6\u5177\u6709\u65cb\u8f6c\u5bf9\u79f0\u6027\uff08\u5982\u5706\u819c\u5fae\u6cf5\uff09\uff0c2D\u8f74\u5bf9\u79f0\u6a21\u578b\u53ef\u4ee5\u5927\u5e45\u51cf\u5c11\u8ba1\u7b97\u91cf<\/li>\n\n\n\n
                  • \u8584\u819c\u7ed3\u6784\u53ef\u4ee5\u7528\u58f3\u5355\u5143\u6216\u8584\u5c42\u5b9e\u4f53\u5355\u5143<\/li>\n\n\n\n
                  • \u6ce8\u610f\u51e0\u4f55\u7279\u5f81\u7684\u53d6\u820d\u2014\u2014\u8fc7\u5ea6\u7b80\u5316\u4f1a\u4e22\u5931\u5173\u952e\u7269\u7406\uff0c\u8fc7\u5ea6\u7ec6\u5316\u4f1a\u62d6\u6162\u8ba1\u7b97<\/li>\n<\/ul>\n\n\n\n

                    Step 3\uff1a\u7f51\u683c\u5212\u5206<\/strong><\/p>\n\n\n\n

                      \n
                    • \u538b\u7535\u6d3b\u8dc3\u533a\u57df\uff08\u5982PZT\u5c42\uff09\u9700\u8981\u66f4\u5bc6\u7684\u7f51\u683c<\/li>\n\n\n\n
                    • \u754c\u9762\u5904\uff08PZT-\u7535\u6781\u3001PZT-\u886c\u5e95\uff09\u9700\u8981\u5c40\u90e8\u52a0\u5bc6<\/li>\n\n\n\n
                    • \u7f51\u683c\u8d28\u91cf\u5f71\u54cd\u6536\u655b\u6027\u548c\u7cbe\u5ea6\u2014\u2014\u7578\u5f62\u5355\u5143\u662f\u5927\u5fcc<\/li>\n\n\n\n
                    • \u5efa\u8bae\u5148\u505a\u7f51\u683c\u65e0\u5173\u6027\u9a8c\u8bc1<\/strong>\uff1a\u4f9d\u6b21\u52a0\u5bc6\u7f51\u683c\uff0c\u770b\u5173\u952e\u8f93\u51fa\u91cf\uff08\u4f4d\u79fb\u3001\u7535\u8377\uff09\u662f\u5426\u6536\u655b<\/li>\n<\/ul>\n\n\n\n

                      Step 4\uff1a\u8fb9\u754c\u6761\u4ef6\u4e0e\u8f7d\u8377<\/strong><\/p>\n\n\n\n

                      \u529b\u5b66\u8fb9\u754c\uff1a\u56fa\u652f\/\u7b80\u652f\/\u81ea\u7531\u2014\u2014\u6839\u636e\u5b9e\u9645\u5b89\u88c5\u65b9\u5f0f\u8bbe\u5b9a\uff1b\u5bf9\u79f0\u8fb9\u754c\u2014\u2014\u5229\u7528\u5bf9\u79f0\u6027\u51cf\u534a\u6a21\u578b\u3002<\/p>\n\n\n\n

                      \u7535\u5b66\u8fb9\u754c\uff1a<\/p>\n\n\n\n

                        \n
                      • \u7535\u6781\u5316\u6761\u4ef6<\/strong>\uff1a\u7535\u6781\u9762\u8bbe\u4e3a\u7b49\u52bf\u9762\uff08\u7b49\u7535\u538b\uff09\u6216\u63a5\u5730<\/li>\n\n\n\n
                      • \u5f00\u8def\u6761\u4ef6<\/strong>\uff1a\u81ea\u7531\u8868\u9762\u7535\u8377\u4e3a\u96f6<\/li>\n\n\n\n
                      • \u9a71\u52a8\u7535\u538b\uff1a\u5728\u7535\u6781\u4e0a\u65bd\u52a0V(t)\uff0c\u5982\u6b63\u5f26\u6ce2\u3001\u9636\u8dc3\u4fe1\u53f7\u7b49<\/li>\n<\/ul>\n\n\n\n

                        Step 5\uff1a\u6c42\u89e3<\/strong><\/p>\n\n\n\n

                          \n
                        • \u9759\u6001\u5206\u6790<\/strong>\uff1a\u7a33\u6001\u54cd\u5e94\uff0c\u9002\u5408\u8ba1\u7b97\u4f4d\u79fb-\u7535\u538b\u5173\u7cfb\u3001\u7535\u5bb9\u7b49<\/li>\n\n\n\n
                        • \u9891\u57df\u5206\u6790<\/strong>\uff1a\u8ba1\u7b97\u963b\u6297\u8c31\u3001\u8c10\u632f\u9891\u7387\u3001\u6709\u6548\u673a\u7535\u8026\u5408\u7cfb\u6570keff<\/li>\n\n\n\n
                        • \u77ac\u6001\u5206\u6790<\/strong>\uff1a\u6a21\u62df\u9636\u8dc3\u54cd\u5e94\u3001\u51b2\u51fb\u54cd\u5e94\u7b49\u52a8\u6001\u884c\u4e3a<\/li>\n\n\n\n
                        • \u7279\u5f81\u9891\u7387\u5206\u6790<\/strong>\uff1a\u786e\u5b9a\u5668\u4ef6\u7684\u6a21\u6001\u548c\u56fa\u6709\u9891\u7387<\/li>\n<\/ul>\n\n\n\n
                          \n

                          \u26a1 \u5bf9\u538b\u7535\u8c10\u632f\u5668\uff08\u5982SAW\u5668\u4ef6\u3001FBAR\uff09\uff0c\u9891\u57df\u5206\u6790\u662f\u6838\u5fc3<\/strong>\u3002\u4f60\u9700\u8981\u627e\u5230\u4e32\u8054\u8c10\u632f\u9891\u7387fs\u548c\u5e76\u8054\u8c10\u632f\u9891\u7387fp\uff0c\u5b83\u4eec\u4e4b\u95f4\u7684\u95f4\u8ddd\u51b3\u5b9a\u4e86\u6ee4\u6ce2\u5668\u7684\u5e26\u5bbd\u3002<\/p>\n<\/blockquote>\n\n\n\n

                          Step 6\uff1a\u540e\u5904\u7406<\/strong><\/p>\n\n\n\n

                            \n
                          • \u4f4d\u79fb\u573a\u3001\u5e94\u529b\u573a\u3001\u7535\u52bf\u573a\u7684\u4e91\u56fe<\/li>\n\n\n\n
                          • \u963b\u6297\/\u5bfc\u7eb3\u66f2\u7ebf<\/li>\n\n\n\n
                          • \u673a\u7535\u8026\u5408\u7cfb\u6570\uff1akeff = \u221a(1 \u2212 fs\u00b2\/fp\u00b2)<\/li>\n\n\n\n
                          • \u80fd\u91cf\u6d41\u5206\u6790\uff08\u9a71\u52a8\u6548\u7387\uff09<\/li>\n<\/ul>\n\n\n\n

                            4.3 \u591a\u573a\u8026\u5408\u7684\u8bbe\u7f6e\u8981\u70b9<\/h3>\n\n\n\n

                            \u94c1\u7535MEMS\u7684\u4eff\u771f\u662f\u5178\u578b\u7684\u591a\u7269\u7406\u573a\u95ee\u9898<\/strong>\u3002\u6700\u57fa\u672c\u7684\u662f\u529b-\u7535\u8026\u5408<\/strong>\uff08\u538b\u7535\u6548\u5e94\uff09\uff0c\u4f46\u5b9e\u9645\u5668\u4ef6\u5f80\u5f80\u8fd8\u6d89\u53ca\u70ed\u5b66\uff1a<\/p>\n\n\n\n

                            \u529b-\u7535\u8026\u5408\uff08\u538b\u7535\u6548\u5e94\uff09<\/strong>\uff1a\u6ce8\u610f\u672c\u6784\u65b9\u7a0b\u7684\u5f62\u5f0f\u9009\u62e9\uff1a\u5e94\u529b-\u7535\u8377\u5f62\u5f0f\uff08e\u578b\uff09\u8fd8\u662f\u5e94\u53d8-\u7535\u8377\u5f62\u5f0f\uff08d\u578b\uff09\u3002d\u578b\u66f4\u76f4\u89c2\uff08d33\u3001d31\u8fd9\u4e9b\u53c2\u6570\u53ef\u4ee5\u76f4\u63a5\u7528\uff09\uff0ce\u578b\u5728\u6709\u9650\u5143\u63a8\u5bfc\u4e2d\u66f4\u81ea\u7136\u3002<\/p>\n\n\n\n

                            \u529b-\u7535-\u70ed\u8026\u5408\uff08\u70ed\u538b\u7535\u6548\u5e94\uff09<\/strong>\uff1a\u6e29\u5ea6\u53d8\u5316\u5f71\u54cd\u538b\u7535\u5e38\u6570\u548c\u4ecb\u7535\u5e38\u6570\uff08\u70ed\u91ca\u7535\u6548\u5e94\uff09\u3002\u5927\u529f\u7387\u9a71\u52a8\u65f6\uff0c\u4ecb\u7535\u635f\u8017\u53d1\u70ed\u5bfc\u81f4\u6e29\u5347\uff0c\u6e29\u5347\u53c8\u6539\u53d8\u6750\u6599\u53c2\u6570\u2014\u2014\u5f62\u6210\u6b63\u53cd\u9988\u3002\u70ed\u6e90\u9879\u9700\u8981\u8003\u8651\u4ecb\u7535\u635f\u8017\uff1aQ = \u03c9\u00b7\u03b5\u2033\u00b7E\u00b2\uff08\u03c9\u4e3a\u89d2\u9891\u7387\uff0c\u03b5\u2033\u4e3a\u4ecb\u7535\u635f\u8017\u56e0\u5b50\uff09\u3002<\/p>\n\n\n\n

                            \u963b\u5c3c\u7684\u8bbe\u7f6e<\/strong>\uff1a\u538b\u7535MEMS\u7684Q\u503c\uff08\u54c1\u8d28\u56e0\u6570\uff09\u5bf9\u8c10\u632f\u7279\u6027\u5f71\u54cd\u5de8\u5927\u3002\u5e38\u7528Rayleigh\u963b\u5c3c\uff1aC = \u03b1M + \u03b2K\uff08M\u4e3a\u8d28\u91cf\u77e9\u9635\uff0cK\u4e3a\u521a\u5ea6\u77e9\u9635\uff09\u3002\u03b1\u63a7\u5236\u4f4e\u9891\u963b\u5c3c\uff0c\u03b2\u63a7\u5236\u9ad8\u9891\u963b\u5c3c\u3002Q\u503c\u901a\u5e38\u4ece\u5b9e\u9a8c\u6d4b\u91cf\u83b7\u53d6\u3002<\/p>\n\n\n\n

                            4.4 \u5e38\u89c1\u5751\u70b9\u4e0e\u8c03\u8bd5\u7ecf\u9a8c<\/h3>\n\n\n\n

                            \u57511\uff1a\u6750\u6599\u53c2\u6570\u5355\u4f4d\u4e0d\u4e00\u81f4<\/strong><\/p>\n\n\n\n

                            \u8fd9\u662f\u65b0\u624b\u6700\u5e38\u72af\u7684\u9519\u8bef\u3002\u4e0d\u540c\u8f6f\u4ef6\u3001\u4e0d\u540c\u6587\u732e\u4f7f\u7528\u7684\u5355\u4f4d\u5236\u53ef\u80fd\u4e0d\u540c\uff1a<\/p>\n\n\n\n

                              \n
                            • SI\u5236 vs CGS\u5236\uff1ad33\u53ef\u80fd\u662f400 pC\/N\uff08SI\uff09\u6216400\u00d710\u207b\u2078 esu\/cm\u00b2\uff08CGS\uff09<\/li>\n\n\n\n
                            • \u5f39\u6027\u5e38\u6570\u7684c vs s\uff1ac\u662f\u521a\u5ea6\uff08Pa\uff09\uff0cs\u662f\u67d4\u5ea6\uff081\/Pa\uff09\uff0c\u522b\u641e\u53cd\u4e86<\/li>\n\n\n\n
                            • \u538b\u7535\u5e38\u6570d vs e\uff1ad\u7684\u5355\u4f4d\u662fC\/N\u6216m\/V\uff0ce\u7684\u5355\u4f4d\u662fC\/m\u00b2<\/li>\n<\/ul>\n\n\n\n
                              \n

                              \ud83d\udca1 \u5efa\u8bae<\/strong>\uff1a\u5efa\u4e00\u4e2a\u53c2\u6570\u68c0\u67e5\u8868\uff0c\u6bcf\u6b21\u5bfc\u5165\u6750\u6599\u53c2\u6570\u65f6\u9010\u4e00\u6838\u5bf9\u5355\u4f4d\u3002<\/p>\n<\/blockquote>\n\n\n\n

                              \u57512\uff1a\u6781\u5316\u65b9\u5411\u8bbe\u7f6e\u9519\u8bef<\/strong><\/p>\n\n\n\n

                              \u94c1\u7535\u8584\u819c\u6709\u7279\u5b9a\u7684\u6781\u5316\u65b9\u5411\uff08\u901a\u5e38\u6cbf\u539a\u5ea6\u65b9\u5411\uff09\uff0c\u5982\u679c\u4eff\u771f\u4e2d\u4e0d\u6b63\u786e\u8bbe\u7f6e\u6781\u5316\u8f74\uff0c\u538b\u7535\u54cd\u5e94\u4f1a\u5b8c\u5168\u9519\u8bef\u3002\u5728COMSOL\u4e2d\uff0c\u9700\u8981\u6b63\u786e\u8bbe\u7f6e”\u6781\u5316\u65b9\u5411”\u5750\u6807\u7cfb\uff1b\u5728Abaqus\u4e2d\uff0c\u9700\u8981\u901a\u8fc7\u6750\u6599\u65b9\u5411\u5b9a\u4e49\u3002<\/p>\n\n\n\n

                              \u57513\uff1a\u5ffd\u7565\u8584\u819c\u4e0e\u4f53\u6750\u6599\u7684\u5dee\u5f02<\/strong><\/p>\n\n\n\n

                              \u4f53PZT\u7684d33\u7ea6400-600 pC\/N\uff0c\u4f46\u8584\u819cPZT\u7684d33\u53ef\u80fd\u53ea\u6709100-200 pC\/N\u2014\u2014\u56e0\u4e3a\u8584\u819c\u6709\u6b8b\u4f59\u5e94\u529b\u3001\u6676\u7c92\u53d6\u5411\u5206\u6563\u3001\u754c\u9762\u5c42\uff08dead layer\uff09\u7b49\u6548\u5e94\u3002\u76f4\u63a5\u62ff\u4f53\u6750\u6599\u53c2\u6570\u4eff\u771f\u8584\u819c\u5668\u4ef6\uff0c\u7ed3\u679c\u4f1a\u4e25\u91cd\u9ad8\u4f30\u6027\u80fd\u3002<\/p>\n\n\n\n

                              \u57514\uff1a\u7535\u6781\u7684\u7b80\u5316\u5904\u7406<\/strong><\/p>\n\n\n\n

                              \u7535\u6781\uff08Pt\u3001Au\u7b49\uff09\u5728\u4eff\u771f\u4e2d\u901a\u5e38\u88ab\u7b80\u5316\u4e3a\u7b49\u52bf\u9762\u8fb9\u754c\u6761\u4ef6\uff0c\u800c\u975e\u771f\u5b9e\u7684\u51e0\u4f55\u5c42\u3002\u8fd9\u5728\u5927\u591a\u6570\u60c5\u51b5\u4e0b\u662f\u5408\u7406\u7684\uff0c\u4f46\u5f53\u7535\u6781\u539a\u5ea6\u4e0ePZT\u5c42\u539a\u5ea6\u53ef\u6bd4\u65f6\uff08\u5982\u539a\u7535\u6781\uff09\uff0c\u7535\u6781\u7684\u529b\u5b66\u8d21\u732e\u4e0d\u53ef\u5ffd\u7565\u3002<\/p>\n\n\n\n

                              \u57515\uff1a\u6536\u655b\u56f0\u96be<\/strong><\/p>\n\n\n\n

                              \u94c1\u7535\u6750\u6599\u4eff\u771f\u4e2d\u7684\u975e\u7ebf\u6027\uff08\u7279\u522b\u662f\u5305\u542b\u8fdf\u6ede\u6a21\u578b\u65f6\uff09\u5bb9\u6613\u5bfc\u81f4\u6536\u655b\u56f0\u96be\u3002\u5bf9\u7b56\uff1a\u964d\u4f4e\u521d\u59cb\u8f7d\u8377\u6b65\u957f\uff0c\u9010\u6b65\u52a0\u8f7d\uff1b\u4f7f\u7528\u5f27\u957f\u6cd5\uff08Riks method\uff09\u5904\u7406\u6781\u5316\u7ffb\u8f6c\u65f6\u7684”\u8df3\u8dc3”\uff1b\u68c0\u67e5\u7f51\u683c\u8d28\u91cf\uff0c\u7578\u5f62\u5355\u5143\u662f\u6536\u655b\u6740\u624b\u3002<\/p>\n\n\n\n

                              \n\n\n\n

                              \u603b\u7ed3<\/h2>\n\n\n\n

                              \u8ba9\u6211\u4eec\u7528\u4e00\u5f20\u8868\u6765\u4e32\u8054\u4eca\u5929\u7684\u5185\u5bb9\uff1a<\/p>\n\n\n\n

                              \u7ef4\u5ea6<\/td>\u6838\u5fc3\u8981\u70b9<\/td><\/tr>
                              \u7269\u7406\u672c\u8d28<\/strong><\/td>\u81ea\u53d1\u6781\u5316\u662f\u94c1\u7535\u6027\u7684\u6839\uff0c\u7535\u6ede\u56de\u7ebf\u662f\u5b83\u7684”\u6307\u7eb9”\uff0c\u5c45\u91cc\u6e29\u5ea6\u662f”\u751f\u6b7b\u7ebf”<\/td><\/tr>
                              MEMS\u5e94\u7528<\/strong><\/td>\u538b\u7535\u9a71\u52a8\u2192”\u808c\u8089”\uff0cFeRAM\u2192”\u8bb0\u5fc6”\uff0c\u4f20\u611f\u5668\u2192”\u795e\u7ecf”\uff0c\u80fd\u91cf\u6536\u96c6\u2192”\u4f9b\u80fd”<\/td><\/tr>
                              \u4eff\u771f\u6a21\u578b<\/strong><\/td>Landau\u770b\u76f8\u53d8\uff0cPreisach\u8ffd\u7cbe\u5ea6\uff0cJ-A\u8bb2\u7269\u7406\uff0c\u76f8\u573a\u770b\u7535\u7574<\/td><\/tr>
                              \u6709\u9650\u5143\u5b9e\u64cd<\/strong><\/td>\u6750\u6599\u53c2\u6570\u662f\u7075\u9b42\uff0c\u591a\u573a\u8026\u5408\u662f\u6838\u5fc3\uff0c\u5355\u4f4d\u4e00\u81f4\u6027\u662f\u5e95\u7ebf<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                              \u94c1\u7535\u6750\u6599\u7684\u6545\u4e8b\uff0c\u4ece\u4e00\u767e\u591a\u5e74\u524dValasek\u9996\u6b21\u5728\u7f57\u8c22\u5c14\u76d0\u4e2d\u89c2\u5bdf\u5230\u7535\u6ede\u56de\u7ebf\u5f00\u59cb\uff0c\u5230\u5982\u4eca\u652f\u6491\u8d77\u5fae\u6cf5\u3001\u5fae\u955c\u3001FeRAM\u3001\u7eb3\u7c73\u5b9a\u4f4d\u53f0\u7b49\u4e00\u7cfb\u5217MEMS\u5668\u4ef6\uff0c\u518d\u5230\u7528\u76f8\u573a\u6cd5\u5728\u8d85\u7ea7\u8ba1\u7b97\u673a\u91cc”\u770b\u5230”\u7535\u7574\u7684\u821e\u8e48\u2014\u2014\u5b83\u59cb\u7ec8\u7ad9\u5728\u7269\u7406\u4e0e\u5de5\u7a0b\u7684\u4ea4\u6c47\u5904\u3002<\/p>\n\n\n\n

                              \u800c\u6709\u9650\u5143\u4eff\u771f\uff0c\u5219\u662f\u8fde\u63a5”\u7406\u89e3\u6750\u6599”\u4e0e”\u8bbe\u8ba1\u5668\u4ef6”\u7684\u6865\u6881\u3002\u638c\u63e1\u4ece\u6750\u6599\u53c2\u6570\u6807\u5b9a\u5230\u591a\u573a\u8026\u5408\u8bbe\u7f6e\u7684\u5b8c\u6574\u6d41\u7a0b\uff0c\u4f60\u5c31\u638c\u63e1\u4e86\u628a\u94c1\u7535\u6750\u6599\u4ece\u5b9e\u9a8c\u5ba4\u63a8\u5411\u4ea7\u54c1\u7684\u5173\u952e\u4e00\u6b65\u3002<\/p>\n\n\n\n

                              \u4e0b\u6b21\u5f53\u4f60\u62ff\u8d77\u624b\u673a\u3001\u5f00\u8f66\u51fa\u884c\u3001\u6216\u8005\u5728\u533b\u9662\u63a5\u53d7\u7cbe\u51c6\u7ed9\u836f\u65f6\uff0c\u6216\u8bb8\u53ef\u4ee5\u60f3\u4e00\u60f3\uff1a\u5728\u8fd9\u4e9b\u5fae\u5c0f\u800c\u7cbe\u5bc6\u7684MEMS\u5668\u4ef6\u6df1\u5904\uff0c\u6b63\u6709\u4e00\u7247\u94c1\u7535\u8584\u819c\uff0c\u5fe0\u5b9e\u5730”\u8bb0\u5fc6”\u7740\u65b9\u5411\uff0c\u7cbe\u51c6\u5730”\u9a71\u52a8”\u7740\u8fd0\u52a8\u2014\u2014\u9ed8\u9ed8\u65e0\u95fb\uff0c\u5374\u4e0d\u53ef\u6216\u7f3a\u3002<\/p>\n\n\n\n

                              \n\n\n\n

                              \u53c2\u8003\u8d44\u6599\u65b9\u5411\uff08\u4f9b\u6269\u5c55\u9605\u8bfb\uff09<\/h2>\n\n\n\n
                                \n
                              1. Jaffe, B., Cook, W. R. & Jaffe, H. Piezoelectric Ceramics<\/em>, Academic Press<\/li>\n\n\n\n
                              2. Lines, M. E. & Glass, A. M. Principles and Applications of Ferroelectrics and Related Materials<\/em>, Oxford<\/li>\n\n\n\n
                              3. Damjanovic, D. “Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics”, Rep. Prog. Phys.<\/em>, 1998<\/li>\n\n\n\n
                              4. COMSOL Multiphysics Documentation – Piezoelectric Devices Module<\/li>\n\n\n\n
                              5. Mayergoyz, I. D. Mathematical Models of Hysteresis<\/em>, Springer<\/li>\n<\/ol>\n\n\n\n
                                \n

                                \u6587\u4e2d\u63d2\u56fe\u5747\u6765\u81ea\u516c\u5f00\u5b66\u672f\u8d44\u6e90\uff08\u767e\u5ea6\u767e\u79d1\u3001\u77e5\u4e4e\u4e13\u680f\u3001CSDN \u535a\u5ba2\u3001Texas Instruments DLP \u6280\u672f\u8d44\u6599\u3001COMSOL \u5b98\u65b9\u535a\u5ba2\u3001\u897f\u5b89\u4ea4\u5927\u65b0\u95fb\u7f51\u3001\u82af\u660e\u5929\u79d1\u6280\u3001Ramtron\/ST \u534a\u5bfc\u4f53\u5b98\u65b9\u6587\u6863\u7b49\uff09\uff0c\u4ec5\u4f9b\u5b66\u672f\u4ea4\u6d41\u4f7f\u7528\u3002<\/p>\n<\/blockquote>\n","protected":false},"excerpt":{"rendered":"

                                \u4ece”\u7535\u8bb0\u5fc6”\u7684\u7269\u7406\u672c\u8d28\u5230\u5fae\u7eb3\u4e16\u754c\u7684\u5de5\u7a0b\u5e94\u7528\u4e0e\u4eff\u771f \u60f3\u8c61\u8fd9\u6837\u4e00\u4e2a\u573a\u666f\uff1a\u4e00\u4e2a\u53ea\u6709\u5934\u53d1\u4e1d\u7c97\u7ec6 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1],"tags":[],"class_list":["post-1243","post","type-post","status-publish","format-standard","hentry","category-blog"],"_links":{"self":[{"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/posts\/1243","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1243"}],"version-history":[{"count":1,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/posts\/1243\/revisions"}],"predecessor-version":[{"id":1250,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=\/wp\/v2\/posts\/1243\/revisions\/1250"}],"wp:attachment":[{"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1243"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1243"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/guagefangzhen.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1243"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}